l and Chemical Plasma Series
For mechanical pumps
Pump-aggressive gases encountered in plasma etching
Oil that condenses in the second group does not recycle back to the pump but remains in the mist eliminator's body
Sight glass enables operator to monitor the quantity of oil retained
Hermetic Series
For hermetically sealed mechanical pumps
Made of stainless steel
Helium leak checked to extremely low leak rates before shipping
Use when pumping precious or exotic gases in a closed loop
Oil mist e